Patent Assignment
Reel/Frame 053751/0580
Assignment of Assignor's Interest
Recorded: 2020-09-11
Pages: 3
Assignors
KANARIK, KEREN J.
Executed: 2020-09-03
TAN, SAMANTHA SIAMHWA
Executed: 2020-09-03
PAN, YANG
Executed: 2020-09-03
MARKS, JEFFREY
Executed: 2020-09-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Etching Chemistries of High Aspect Ratio Features in Dielectrics