Patent Assignment
Reel/Frame 053922/0133
Assignment of Assignor's Interest
Recorded: 2020-09-29
Pages: 8
Assignors
ZHAO, JIANPING
Executed: 2020-09-28
VENTZEK, PETER
Executed: 2020-09-28
SCHLECHTE, CHARLES
Executed: 2020-09-28
HUMMEL, MICHAEL
Executed: 2020-09-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Quantification of Processing Chamber Species by Electron Energy Sweep