Patent Assignment
Reel/Frame 054104/0138
Assignment of Assignor's Interest
Recorded: 2020-10-20
Pages: 4
Assignor
TANOUE, HAYATO
Executed: 2020-10-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Processing Method