Patent Assignment
Reel/Frame 054154/0907
Assignment of Assignor's Interest
Recorded: 2020-10-23
Pages: 3
Assignors
LEE, HYO CHANG
Executed: 2020-09-28
KIM, JUNG HYUNG
Executed: 2020-09-28
SEONG, DAE JIN
Executed: 2020-09-28
YEOM, HEE JUNG
Executed: 2020-09-28
Assignee
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
267 GAJEONG-RO, YUSEONG-GU, DAEJEON, 34113, KOREA, REPUBLIC OF
Covered Property
(1)
Planar-Type Plasma Diagnosis Apparatus, Wafer-Type Plasma Diagnosis Apparatus in Which Planar-Type Plasma Diagnosis Apparatus Is Buried, and Electrostatic Chuck in Which Planar-Type Plasma Diagnosis Apparatus Is Buried