Patent Assignment
Reel/Frame 054203/0630
Assignment of Assignor's Interest
Recorded: 2020-10-29
Pages: 6
Assignors
LI, JIANHENG
Executed: 2018-07-18
VRTIS, RAYMOND NICHOLAS
Executed: 2018-07-19
RIDGEWAY, ROBERT GORDON
Executed: 2018-07-19
XIAO, MANCHAO
Executed: 2018-07-18
LEI, XINJIAN
Executed: 2018-07-18
Assignee
VERSUM MATERIALS US LLC
8555 S. RIVER PARKWAY, TEMPE, ARIZONA, 85284
Covered Property
(1)
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features
Application:
17/083,356 →
Publication:
US 2021/0043446