Patent Assignment
Reel/Frame 054306/0278
Assignment of Assignor's Interest
Recorded: 2020-11-07
Pages: 7
Assignors
CHANG, CHAO
Executed: 2020-10-22
CLARKE, BEN
Executed: 2020-10-21
FRIEDMANN, MICHAEL
Executed: 2020-10-22
KIM, JONGJIN
Executed: 2020-10-22
SCHUMAKER, WILL
Executed: 2020-11-06
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Laser Produced Plasma Illuminator With Low Atomic Number Cryogenic Target