Patent Assignment
Reel/Frame 054357/0768
Assignment of Assignor's Interest
Recorded: 2020-11-13
Pages: 4
Assignors
KUMAGAI, KAE
Executed: 2020-11-05
HISAMATSU, TORU
Executed: 2020-11-10
HONDA, MASANOBU
Executed: 2020-11-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus