Patent Assignment
Reel/Frame 054537/0614
Assignment of Assignor's Interest
Recorded: 2020-12-03
Pages: 3
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Sputtering Apparatus and Method of Forming Film