Patent Assignment
Reel/Frame 054656/0854
Assignment of Assignor's Interest
Recorded: 2020-12-15
Pages: 3
Assignors
LIN, WEI-CHU
Executed: 2020-11-17
TENG, YI-CHUAN
Executed: 2020-11-17
TU, JUNG-KUO
Executed: 2020-11-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Mems Device and Manufacturing Method Thereof