Patent Assignment
Reel/Frame 054888/0602
Assignment of Assignor's Interest
Recorded: 2021-01-12
Pages: 7
Assignors
O'TOOLE, MARTIN
Executed: 2021-01-12
WILSON, CHRISTOPHER
Executed: 2020-12-04
TOKEI, ZSOLT
Executed: 2020-12-16
KIM, RYAN RYOUNG HAN
Executed: 2020-12-04
Assignee
IMEC VZW
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Method for Forming a Via Hole Self-aligned with a Metal Block on a Substrate