Patent Assignment
Reel/Frame 054892/0157
Assignment of Assignor's Interest
Recorded: 2021-01-12
Pages: 7
Assignors
ZEIDLER, DIRK
Executed: 2020-11-05
SCHALL, MICHAEL
Executed: 2020-10-29
JACOBI, JOERG
Executed: 2020-10-27
LE MAIRE, MICHEL
Executed: 2020-10-29
Assignee
CARL ZEISS MULTISEM GMBH
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
System Combination of a Particle Beam System and a Light-Optical System with Collinear Beam Guidance, and Use of the System Combination