Patent Assignment
Reel/Frame 054978/0628
Assignment of Assignor's Interest
Recorded: 2021-01-21
Pages: 15
Assignors
ITOH, SATOSHI
Executed: 2020-11-20
NOGAMI, TAKAFUMI
Executed: 2021-01-11
YOKOKURA, EITA
Executed: 2020-12-21
MATSUMOTO, REISA
Executed: 2020-12-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method