Patent Assignment
Reel/Frame 055065/0735
Assignment of Assignor's Interest
Recorded: 2021-01-28
Pages: 5
Assignors
KUO, YI-CHEN
Executed: 2020-12-02
LIU, CHIH-CHENG
Executed: 2020-12-02
WENG, MING-HUI
Executed: 2020-12-10
WEI, JIA-LIN
Executed: 2020-12-10
CHEN, YEN-YU
Executed: 2020-12-02
LI, JR-HUNG
Executed: 2020-12-08
CHENG, YAHRU
Executed: 2020-12-15
YANG, CHI-MING
Executed: 2020-12-10
LEE, TZE-LIANG
Executed: 2020-12-08
CHANG, CHING-YU
Executed: 2020-12-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Layer Surface Treatment, Cap Layer, and Method of Forming Photoresist Pattern