Patent Assignment
Reel/Frame 055072/0072
Assignment of Assignor's Interest
Recorded: 2021-01-29
Pages: 2
Assignor
HASHIMOTO, KOJI
Executed: 2018-07-11
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Device