Patent Assignment
Reel/Frame 055358/0059
Assignment of Assignor's Interest
Recorded: 2021-02-22
Pages: 2
Assignor
LU, XIAOMING
Executed: 2021-02-10
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Planarization Apparatus Including Superstrate Chuck with Bendable Periphery