Patent Assignment
Reel/Frame 055502/0651
Assignment of Assignor's Interest
Recorded: 2021-03-05
Pages: 4
Assignors
ZHANG, XINMING
Executed: 2021-02-22
MAYUR, ABHILASH J.
Executed: 2021-02-19
SHARMA, SHASHANK
Executed: 2021-02-19
TAM, NORMAN L
Executed: 2021-03-04
SPULLER, MATTHEW
Executed: 2021-02-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System and Method for Radical and Thermal Processing of Substrates