Patent Assignment
Reel/Frame 055926/0447
Assignment of Assignor's Interest
Recorded: 2021-04-15
Pages: 2
Assignors
KIMIZUKA, HEITA
Executed: 2021-02-08
TSUNO, NATSUKI
Executed: 2021-02-08
FUKUDA, MUNEYUKI
Executed: 2021-02-02
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Adjusting Method of Charged Particle Beam Device and Charged Particle Beam Device System