Patent Assignment
Reel/Frame 056213/0467
Assignment of Assignor's Interest
Recorded: 2021-05-12
Pages: 3
Assignors
FUNK, MERRITT
Executed: 2021-05-10
VENTZEK, PETER
Executed: 2021-05-10
RANJAN, ALOK
Executed: 2021-05-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods For Real-Time Pulse Measurement And Pulse Timing Adjustment To Control Plasma Process Performance