Patent Assignment
Reel/Frame 056402/0174
Assignment of Assignor's Interest
Recorded: 2021-06-01
Pages: 7
Assignors
JEN, CAUSON KO-CHUAN
Executed: 2021-02-04
SATOH, SHU
Executed: 2021-02-04
BONACORSI, GENISE
Executed: 2021-02-04
BINTZ, WILLIAM
Executed: 2021-05-03
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Apparatus and Method for Metal Contamination Control in an Ion Implantation System Using Charge Stripping Mechanism