Patent Assignment
Reel/Frame 056503/0895
Assignment of Assignor's Interest
Recorded: 2021-06-10
Pages: 7
Assignors
MISHRA, AMIT
Executed: 2021-04-20
ZOPE, BHUSHAN
Executed: 2021-04-22
SWAMINATHAN, SHANKAR
Executed: 2021-04-15
OOSTERLAKEN, THEODORUS G.M.
Executed: 2021-04-19
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Apparatus and Methods for Performing an in-Situ Etch of Reaction Chambers with Fluorine-Based Radicals