Patent Assignment
Reel/Frame 056719/0235
Assignment of Assignor's Interest
Recorded: 2021-06-30
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Surface Fluorination Remediation For Aluminium Oxide Electrostatic Chucks