Patent Assignment
Reel/Frame 056826/0039
Assignment of Assignor's Interest
Recorded: 2021-07-12
Pages: 14
Assignors
SHINAGAWA, JUN
Executed: 2021-07-08
KITAO, TOSHIHIRO
Executed: 2021-07-08
NAGAHATA, HIROSHI
Executed: 2021-07-09
LEE, CHUNGJONG
Executed: 2021-07-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Tool Health Monitoring and Classifications with Virtual Metrology and Incoming Wafer Monitoring Enhancements