Patent Assignment
Reel/Frame 056909/0539
Assignment of Assignor's Interest
Recorded: 2021-07-20
Pages: 2
Assignor
SHKLOVER, VITALIY
Executed: 2021-07-19
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for in Situ Protection of an Aluminum Layer and Optical Arrangement for the Vuv Wavelength Range