Patent Assignment
Reel/Frame 057250/0868
Assignment of Assignor's Interest
Recorded: 2021-08-21
Pages: 3
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31156, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Method of Fabricating Same