Patent Assignment
Reel/Frame 057445/0711
Assignment of Assignor's Interest
Recorded: 2021-09-10
Pages: 8
Assignors
NEFZI, MARWÈNE
Executed: 2021-07-20
HEMBACHER, STEFAN
Executed: 2021-07-20
TROEGER, STEFAN
Executed: 2021-08-04
ZWEERING, RALF
Executed: 2021-07-25
STEIMER, KONRAD CARL
Executed: 2021-07-23
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Compensation of Creep Effects in an Imaging Device