Patent Assignment
Reel/Frame 057542/0868
Assignment of Assignor's Interest
Recorded: 2021-09-21
Pages: 3
Assignors
XU, KUN
Executed: 2021-08-31
CHERIAN, BENJAMIN
Executed: 2021-08-30
QIAN, JUN
Executed: 2021-08-30
SHRESTHA, KIRAN LALL
Executed: 2021-09-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Determination of Substrate Layer Thickness with Polishing Pad Wear Compensation