Patent Assignment
Reel/Frame 057953/0109
Security Interest
Recorded: 2021-10-28
Received: 2021-10-28
Pages: 7
Assignors
ELECTRO SCIENTIFIC INDUSTRIES, INC.
Executed: 2021-10-26
MKS INSTRUMENTS, INC.
Executed: 2021-10-26
Assignee
BARCLAYS BANK PLC
745 SEVENTH AVENUE, NEW YORK, NY, 10019, UNITED STATES
Covered Properties
(6)
Laser Processing Apparatus, Methods of Operating the Same, and Methods of Processing Workpieces Using the Same
Application:
17/599,756 →
Multi-Wavelength Ozone Concentration Sensor and Method of Use
Application:
17/486,139 →
Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation
Application:
17/406,378 →
Adaptive Pulse Shaping With Post Match Sensor
Application:
17/396,901 →
Method and Apparatus for Plasma Generation
Application:
17/391,724 →
GaN Clamp with Uniform Pressure
Application:
17/365,479 →