Patent Assignment
Reel/Frame 057996/0207
Assignment of Assignor's Interest
Recorded: 2021-11-02
Pages: 4
Assignors
ZHANG, QI
Executed: 2018-06-04
LU, XINLIANG
Executed: 2018-06-14
CHUNG, HUA
Executed: 2018-06-14
YANG, MICHAEL X.
Executed: 2018-06-14
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD.
NO.8 BUILDING, NO.28 JINGHAI ER RD., ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
Covered Property
(1)
Generation of Hydrogen Reactive Species For Processing of Workpieces
Application:
17/516,065 →
Publication:
US 2022/0059321