Patent Assignment
Reel/Frame 058187/0929
Assignment of Assignor's Interest
Recorded: 2021-11-18
Pages: 27
Assignors
KUNUGIMOTO, YUICHIRO
Executed: 2021-10-19
UEYAMA, SHOTA
Executed: 2021-10-20
TERAMOTO, AKIHIRO
Executed: 2021-10-19
NISHIYAMA, YUTA
Executed: 2021-10-26
HATAKEYAMA, SHINICHI
Executed: 2021-10-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System, Liquid Amount Measuring Method, Computer-Readable Recording Medium, and Meassuring Jig