Patent Assignment
Reel/Frame 058212/0599
Assignment of Assignor's Interest
Recorded: 2021-11-26
Pages: 10
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Method, Recording Medium, and Substrate Processing Apparatus