Patent Assignment
Reel/Frame 058408/0413
Assignment of Assignor's Interest
Recorded: 2021-12-16
Pages: 5
Assignor
WAKABAYASHI, SATOSHI
Executed: 2021-12-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Processing Method and Substrate Processing System