Patent Assignment
Reel/Frame 058482/0001
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2021-12-09
Received: 2021-12-09
Pages: 63
Assignor
BROOKS AUTOMATION HOLDING, LLC
Executed: 2021-10-01
Assignee
BROOKS AUTOMATION US, LLC
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Applications
(100)
DATA SUBJECT ACCESS REQUEST PROCESSING SYSTEMS AND RELATED METHODS
App. No. 17/562,299
→
ASSEMBLY ERROR CORRECTION FOR ASSEMBLY LINES
App. No. 17/646,063
→
System and Method for Big Number Hardware Multiplication for Cryptography
App. No. 17/562,490
→
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
App. No. 17/398,847
→
Tray Engine and Methods for Transferring Trays to and From Tools and in Sorters
App. No. 17/382,858
→
CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER
App. No. 17/362,716
→
AUTOMATED TEACH APPARATUS FOR ROBOTIC SYSTEMS AND METHOD THEREFOR
App. No. 17/362,565
→
SUBSTRATE MAPPING APPARATUS AND METHOD THEREFOR
App. No. 17/362,599
→
LOAD PORT MODULE
App. No. 17/341,638
→
ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
App. No. 17/229,495
→
SUBSTRATE PROCESS APPARATUS
App. No. 17/180,298
→
LOAD PORT MODULE
App. No. 17/176,949
→
SUBSTRATE PROCESSING APPARATUS
App. No. 17/167,831
→
DUAL SCARA ARM
App. No. 17/158,723
→
TRANSPORT APPARATUS AND ADAPTER PENDANT
App. No. 17/158,523
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 17/156,007
→
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
App. No. 17/136,661
→
SUBSTRATE PROCESSING APPARATUS
App. No. 17/108,530
→
LOAD LOCK FAST PUMP VENT
App. No. 17/108,473
→
METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
App. No. 17/103,243
→
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
App. No. 17/102,811
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 17/081,811
→
TOOL AUTO-TEACH METHOD AND APPARATUS
App. No. 17/014,575
→
WAFER ALIGNER
App. No. 17/002,587
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 16/996,409
→
AUTOMATIC HANDLING BUFFER FOR BARE STOCKER
App. No. 16/990,812
→
DUAL ARM ROBOT
App. No. 16/990,775
→
ROBOT EMBEDDED VISION APPARATUS
App. No. 16/942,255
→
RETICLE COMPARTMENT AND DIFFUSOR PLATE
App. No. 16/940,976
→
SUBSTRATE PROCESS APPARATUS
App. No. 16/899,151
→
METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
App. No. 16/872,864
→
POSITION FEEDBACK FOR SEALED ENVIRONMENTS
App. No. 16/838,785
→
SUBSTRATE PROCESSING APPARATUS
App. No. 16/825,663
→
INSPECTION SYSTEM
App. No. 16/821,149
→
METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
App. No. 16/793,623
→
TRANSPORT APPARATUS
App. No. 16/787,184
→
SUBSTRATE PROCESSING APPARATUS
App. No. 62/970,565
→
CONTAINER STORAGE ADD-ON FOR BARE WORKPIECE STOCKER
App. No. 16/723,009
→
LOAD LOCK FAST PUMP VENT
App. No. 16/722,930
→
INSPECTION SYSTEM AND METHOD OF INSPECTION FOR SUBSTRATE CONTAINERS
App. No. 16/619,707
→
METHOD FOR INSPECTING A CONTAINER AND INSPECTION SYSTEM
App. No. 16/619,713
→
METHOD FOR CONTROLLING A PLC USING A PC PROGRAM
App. No. 16/619,020
→
COMPACT DIRECT DRIVE SPINDLE
App. No. 16/702,403
→
SCALABLE MOTION CONTROL SYSTEM
App. No. 16/696,822
→
LOAD PORT MODULE
App. No. 16/692,443
→
LOAD PORT MODULE
App. No. 16/692,359
→
SEALED ROBOT DRIVE
App. No. 16/674,933
→
TRANSPORT APPARATUS WITH LINEAR BEARING
App. No. 16/668,290
→
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
App. No. 16/660,562
→
TOOL COMPILER
App. No. 16/660,669
→
SUBSTRATE PROCESSING APPARATUS
App. No. 16/592,431
→
METHOD AND APPARATUS FOR SUBSTRATE ALIGNMENT
App. No. 16/570,453
→
UNEQUAL LINK SCARA ARM
App. No. 16/566,730
→
SUBSTRATE TRANSPORT
App. No. 16/552,881
→
TOOL AUTO-TEACH METHOD AND APPARATUS
App. No. 16/539,819
→
SEALED SWITCHED RELUCTANCE MOTOR
App. No. 16/506,679
→
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
App. No. 16/460,676
→
SUBSTRATE PROCESSING APPARATUS
App. No. 16/444,225
→
SUBSTRATE PROCESSING APPARATUS
App. No. 16/426,983
→
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
App. No. 16/364,034
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 16/354,954
→
RETICLE COMPARTMENT AND DIFFUSOR PLATE
App. No. 16/328,848
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 16/272,974
→
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
App. No. 16/257,595
→
METHOD FOR CLEANING A SYNTHETIC SURFACE
App. No. 16/304,836
→
DUAL SCARA ARM
App. No. 16/201,899
→
TRANSPORT APPARATUS
App. No. 16/201,539
→
ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
App. No. 16/197,087
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 16/197,107
→
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
App. No. 16/181,208
→
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
App. No. 16/155,714
→
SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH
App. No. 16/151,598
→
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
App. No. 16/150,166
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 16/121,148
→
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE ARTICLES
App. No. 16/119,465
→
End Effector with Slides for Transferring Trays
App. No. 16/116,025
→
TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
App. No. 16/115,505
→
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
App. No. 16/057,480
→
DUAL ARM ROBOT
App. No. 16/043,757
→
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
App. No. 16/036,828
→
SEMICONDUCTOR PROCESS TRANSPORT APPARATUS COMPRISING AN ADAPTER PENDANT
App. No. 16/029,320
→
TOOL AUTO-TEACH METHOD AND APPARATUS
App. No. 16/011,978
→
SIDE OPENING UNIFIED POD
App. No. 15/986,710
→
COLLABORATIVE ROBOT
App. No. 15/981,047
→
METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
App. No. 15/971,827
→
WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION
App. No. 15/954,230
→
SEALED ROBOT DRIVE
App. No. 15/952,595
→
HUMIDITY CONTROL IN SEMICONDUCTOR SYSTEMS
App. No. 15/765,855
→
METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT
App. No. 15/889,811
→
TOOL COMPILER
App. No. 15/882,735
→
METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
App. No. 15/880,387
→
Workpiece Support Structures and Apparatus for Accessing Same
App. No. 15/875,890
→
SUBSTRATE TRANSPORT APPARATUS WITH INTERCHANGEABLE MOTOR MODULES
App. No. 15/743,727
→
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
App. No. 15/866,215
→
SUBSTRATE PROCESSING APPARATUS
App. No. 15/849,002
→
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
App. No. 15/816,728
→
SUBSTRATE TRANSPORT APPARATUS
App. No. 15/702,436
→
COMPACT DIRECT DRIVE SPINDLE
App. No. 15/695,744
→
Inspection System
App. No. 15/555,347
→
SUBSTRATE PROCESSING APPARATUS
App. No. 15/693,871
→