Patent Assignment
Reel/Frame 058542/0209
Assignment of Assignor's Interest
Recorded: 2022-01-04
Pages: 3
Assignors
CHEN, JIAN JANSON
Executed: 2021-12-29
YANG, YI
Executed: 2021-12-21
MA, CHONG
Executed: 2021-12-30
XUE, YUAN
Executed: 2021-12-24
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Controlling Radio Frequency Electrode Impedances in Process Chambers