Patent Assignment
Reel/Frame 058842/0580
Assignment of Assignor's Interest
Recorded: 2022-02-01
Pages: 7
Assignors
ZHANG, LIBIN
Executed: 2022-01-25
WEI, YAYI
Executed: 2022-01-25
SONG, ZHEN
Executed: 2022-01-25
Assignee
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
Method for Manufacturing Semiconductor Device