Patent Assignment
Reel/Frame 058849/0091
Assignment of Assignor's Interest
Recorded: 2022-02-01
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Strip Tool with Multiple Gas Injection Zones
Application:
17/387,393 →
Publication:
US 2021/0398775
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.