Patent Assignment
Reel/Frame 058992/0828
Assignment of Assignor's Interest
Recorded: 2022-02-11
Pages: 6
Assignors
KIM, JIN GYUN
Executed: 2022-02-03
AHN, CHANG UK
Executed: 2022-02-03
LEE, JI WON
Executed: 2022-02-03
BECK, IN CHAN
Executed: 2022-02-03
KWON, DO HYEONG
Executed: 2022-02-03
Assignee
UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
(SEOCHEON-DONG) 1732, DEOGYEONG-DAERO, GIHEUNG-GU, YONGIN-SI, GYEONGGI-DO, 17104, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Controlling Temperature Uniformity of Substrate