Patent Assignment
Reel/Frame 059132/0369
Assignment of Assignor's Interest
Recorded: 2022-03-01
Pages: 7
Assignors
LIM, HANJIN
Executed: 2022-01-26
KIM, YOUNSOO
Executed: 2022-01-26
MOON, SUNMIN
Executed: 2022-01-26
PARK, JUNGMIN
Executed: 2022-01-26
JUNG, HYUNGSUK
Executed: 2022-01-26
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Batch-Type Apparatus for Atomic Layer Etching (Ale), and Ale Method and Semiconductor Device Manufacturing Method Based on the Same Apparatus