Patent Assignment
Reel/Frame 059305/0554
Assignment of Assignor's Interest
Recorded: 2022-03-18
Pages: 9
Assignors
KOSHI, YASUNOBU
Executed: 2022-03-10
OKUDA, KAZUYUKI
Executed: 2022-03-10
HASHIMOTO, YOSHITOMO
Executed: 2022-03-10
HARADA, KATSUYOSHI
Executed: 2022-03-14
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Non-Transitory Computer-Readable Recording Medium and Substrate Processing Apparatus