Patent Assignment
Reel/Frame 059312/0168
Assignment of Assignor's Interest
Recorded: 2022-03-18
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Induction Coil Assembly for Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.