Assignment of Assignor's Interest

Recorded: 2022-03-28 Pages: 3

Assignors

MENG, SHUANG

Executed: 2018-01-08

MA, SHAWMING

Executed: 2018-01-08

YANG, MICHAEL X.

Executed: 2018-01-09

Assignee

MATTSON TECHNOLOGY, INC.

47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Processing of Semiconductors Using Vaporized Solvents

Application: 17/706,090 →

Publication: US 2022/0223405

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.