Patent Assignment
Reel/Frame 059716/0366
Assignment of Assignor's Interest
Recorded: 2022-04-29
Pages: 4
Assignors
AGNEW, DOUGLAS WALTER
Executed: 2020-06-04
ABEL, JOSEPH R.
Executed: 2020-06-04
CURTIN, IAN JOHN
Executed: 2020-06-05
KUMAR, PURUSHOTTAM
Executed: 2020-06-04
GUPTA, AWNISH
Executed: 2020-06-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In-Situ Control of Film Properties During Atomic Layer Deposition