Patent Assignment
Reel/Frame 059822/0609
Assignment of Assignor's Interest
Recorded: 2022-05-05
Pages: 5
Assignors
SHIBA, EIICHIRO
Executed: 2022-03-16
TAKAYAMA, TOMOMI
Executed: 2022-03-17
HSU, CHE CHEN
Executed: 2022-03-17
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Mitigating Underlayer Damage During Formation of Patterned Structures
Application:
17/711,998 →
Publication:
US 2022/0319833