Patent Assignment
Reel/Frame 059868/0689
Assignment of Assignor's Interest
Recorded: 2022-05-09
Pages: 4
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Adsorbents and Methods for Reducing Contamination in Wafer Container Microenvironments
Application:
63/224,564 →