Patent Assignment
Reel/Frame 060457/0698
Assignment of Assignor's Interest
Recorded: 2022-07-08
Pages: 5
Assignor
MATTSON THERMAL PRODUCTS, GMBH.
Executed: 2021-02-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Rapid Thermal Processing System With Cooling System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 8, 2022
From: SOHN, MANUEL; BREMENSDORFER, ROLF; HAMM, SILKE; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 060457/0703 →
Assignment of Assignor's Interest
Jul 8, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 060457/0709 →