Patent Assignment
Reel/Frame 060703/0161
Assignment of Assignor's Interest
Recorded: 2022-08-03
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Workpiece Processing Apparatus with Thermal Processing Systems
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 3, 2022
From: BREMENSDORFER, ROLF
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 060703/0154 →
Assignment of Assignor's Interest
Aug 3, 2022
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060703/0157 →
Assignment of Assignor's Interest
Feb 11, 2023
From: HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 062665/0546 →