Patent Assignment
Reel/Frame 060864/0522
Assignment of Assignor's Interest
Recorded: 2022-08-23
Pages: 3
Assignor
HONMA, MANABU
Executed: 2022-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Apparatus for Performing Film Forming Process on Substrate, and Method of Exhausting Processing Gas from Apparatus for Performing Film Forming Process on Substrate