Patent Assignment
Reel/Frame 061922/0128
Assignment of Assignor's Interest
Recorded: 2022-11-30
Pages: 4
Assignors
CHEN, PHILIP S.H.
Executed: 2018-11-09
HENDRIX, BRYAN C.
Executed: 2018-11-09
BAUM, THOMAS H.
Executed: 2018-11-09
Assignee
ENTEGRIS, INC.
129 CONCORD RD., BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Chemical Vapor Deposition Processes Using Ruthenium Precursor and Reducing Gas
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.