Patent Assignment
Reel/Frame 062095/0271
Assignment of Assignor's Interest
Recorded: 2022-12-14
Pages: 9
Assignors
WRIGHT, ROBERT, JR.
Executed: 2018-10-11
MENG, SHUANG
Executed: 2018-10-15
HENDRIX, BRYAN C.
Executed: 2018-08-20
BAUM, THOMAS H.
Executed: 2018-11-13
CHEN, PHILIP S.H.
Executed: 2018-08-20
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Vapor Deposition of Molybdenum Using a Bis(Alkyl-Arene) Molybdenum Precursor
Application:
18/081,497 →
Publication:
US 2023/0128330