Patent Assignment
Reel/Frame 062121/0065
Assignment of Assignor's Interest
Recorded: 2022-12-16
Pages: 6
Assignors
TANAKA, AKINORI
Executed: 2018-02-23
TATENO, HIDETO
Executed: 2018-02-23
HORII, SADAYOSHI
Executed: 2018-02-23
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.