Patent Assignment
Reel/Frame 062165/0017
Assignment of Assignor's Interest
Recorded: 2022-12-20
Pages: 3
Assignors
SINGHAL, AKHIL
Executed: 2021-07-21
KANAKASABAPATHY, SIVANANDA KRISHNAN
Executed: 2021-07-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Advanced Self Aligned Multiple Patterning Using Tin Oxide
Application:
18/002,627 →
Publication:
US 2023/0238238